Papers presented at the European Materials Research Society 1999 Spring Meeting, Symposium F: Process Induced Defects in Semiconductors, June 1-4, 1999, Strasbourg, France

guest editors, A. Mesli, Wolfgang Schröter, J. Weber.

Amsterdam : Elsevier, ©2000.

ix, 340 págs. : ilustraciones ; 28 cm.

Serie: Materials science & engineering. B, Solid-state materials for advanced technology ; v. B71 (14 Feb., 2000).

Título del lomo: E-MRS Spring '99, Symposium F

"Special issue"—P. v.

Incluye indices.

Incluye referencias bibliográficas.