Digest of papers : MicroProcesses and Nanotechnology '97 : 1997 International MicroProcesses and Nanotechnology Conference, July 7-10, 1997, Nagoya, Japan

sponsored by the Japan Society of Applied Physics in cooperation with IEEE Electron Devices Society ... [et al.].

Tokyo, Japan : Business Center for Academic Societies Japan, ©1997.

xx, 238 págs. : ilustraciones ; 28 cm.

Serie: Japanese Journal of Applied Physics ; v. 36, no. 12B (1997)