Catálogo Bibliográfico
LDR | ·····cam##22·····Ka#4500 |
001 | 007502 |
005 | 20060807090534.0 |
008 | 010109s1997####ja#a##########100#0#eng#d |
245 | 10 | $a Digest of papers : $b MicroProcesses and Nanotechnology '97 : 1997 International MicroProcesses and Nanotechnology Conference, July 7-10, 1997, Nagoya, Japan / $c sponsored by the Japan Society of Applied Physics in cooperation with IEEE Electron Devices Society ... [et al.]. |
260 | ## | $a Tokyo, Japan : $b Business Center for Academic Societies Japan, $c c1997. |
300 | ## | $a xx, 238 p. : $b il. ; $c 28 cm. |
111 | 2# | $a International MicroProcesses and Nanotechnology Conference $n (10th : $d 1997 : $c Nagoya, Japan) |
710 | 2# | $a IEEE Electron Devices Society. |
710 | 2# | $a åOyåo Butsuri Gakkai. |
710 | 2# | $a Business Center for Academic Societies Japan. |
080 | ## | $a 621.38:061.3 |
650 | #0 | $a Integrated circuits $x Very large scale integration $x Design and construction $v Congresses. |
650 | #0 | $a Lithography $v Congresses. |
650 | #0 | $a Nanotechnology $v Congresses. |
650 | #0 | $a Microelectronics $v Congresses. |
490 | 1# | $a Japanese Journal of Applied Physics ; $v v. 36, no. 12B (1997) |
040 | ## | $a CAI $c CAI $d OCLCQ $b spa $d arbccab |