Título/responsables | New trends in ion beam processing from ions and cluster ion beams to engineering issues : proceedings of the E-MRS '95 Spring Meeting Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation, Symp. C on Pushing the Limits of Ion Beam Processing - From Engineering to Atomic Scale Issues, Strasbourg, France, May 22-26, 1995 / editors, Peter L. F. Hemment, Jean-Paul Thomas. |
Publicación |
Amsterdam : North-Holland, 1996. |
Detalles físicos |
xv, 355 págs. : ilustraciones ; 27 cm. |
Colección | Nuclear instruments & methods in physics research. Section B ISSN 0168-583X ; v. 112
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Notas |
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Temas |
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Nombres |
Hemment, Peter L. F.
Thomas, Jean-Paul.
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Reunión |
Symposium J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation (1995 : Strasbourg, France) Symposium C on Pushing the Limits of Ion Beam Processing-from Engineering to Atomic Scale Issues (1995 : Strasbourg, France) |
Títulos alt. | Proceedings of the E-MRS '95 Symp. J + C on New Trends in Ion Beam Processing From Ions and Cluster Ion Beams to Engineering Issues, Strasbourg, France, May 22-26, 1995. |
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NUCL. INSTRUM. METH. PHYS. RES. B 1996 |
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