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751101d19641982nyubx#p#######0###a0eng#c
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| 010 |
## |
$a ###68053979# $z sn#83011019# |
| 016 |
7# |
$a 9890565 $2 DNLM |
| 016 |
7# |
$a SR0088358 $2 DNLM |
| 022 |
## |
$a 0022-5355 $l 0022-5355 $2 1 |
| 040 |
## |
$a MnMULS $c MnMULS $d NSDP $d InU $d NSDP $d WaU $d DLC $d NST $d DLC $d NST $d AIP $d NSDP $d AIP $d NST $d AIP $d DLC $d MH $d DLC $d NST $d MH $d MCM $d DNLM $d OCoLC $d TxCM $d NLGGC $d CaQQL $d CU-S $d OCoLC |
| 210 |
0# |
$a J. vac. sci. technol. |
| 222 |
#0 |
$a Journal of vacuum science & technology |
| 245 |
04 |
$a The Journal of vacuum science and technology. |
| 260 |
## |
$a [New York, N.Y.] : $b Published for the American Vacuum Society by the American Institute of Physics, $c [1964-1982] |
| 300 |
## |
$a 21 v. : $b il. ; $c 28 cm. |
| 310 |
## |
$a 8 no. a year, $b 1982 |
| 321 |
## |
$a Bimonthly, $b 1964-1980 |
| 321 |
## |
$a 7 no. a year, $b 1981 |
| 362 |
0# |
$a Vol. 1, no. 1 (Sept./Oct. 1964)-v. 21, no. 4 (Nov./Dec. 1982). |
| 500 |
## |
$a Title varies slightly. |
| 500 |
## |
$a Title from cover. |
| 510 |
0# |
$a Chemical abstracts $x 0009-2258 |
| 530 |
## |
$a Also issued on microfilm. |
| 550 |
## |
$a Official publication of the American Vacuum Society. |
| 580 |
## |
$a Split into: Journal of vacuum science & technology. A, Vacuum, surfaces and films, and: Journal of vacuum science & technology. B, Microelectronics processing and phenomena. |
| 650 |
#0 |
$a Vacuum technology $v Periodicals. |
| 650 |
17 |
$a Vacuümtechniek. $2 gtt |
| 710 |
2# |
$a American Institute of Physics. |
| 710 |
2# |
$a American Vacuum Society. |
| 776 |
08 |
$i Online version: $t Journal of vacuum science and technology (Online) $w (DLC) 2003263060 $w (OCoLC)46870934 |
| 785 |
16 |
$t Journal of vacuum science & technology. A, Vacuum, surfaces, and films $x 0734-2101 $w (DLC) 83643441 $w (OCoLC)8697396 $w (arbccab)016872 |
| 785 |
16 |
$t Journal of vacuum science & technology. B, Microelectronics processing and phenomena $x 0734-211X $w (DLC) 83642371 $w (OCoLC)8697479 $w (arbccab)016873 |
| 866 |
#0 |
$a 1964, 1 (1,2); 1965-1982, 2-21. |
