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$a J. vac. sci. technol., B Microelectron. process. phenom. |
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$a Journal of vacuum science & technology. B, Microelectronics processing and phenomena |
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$a Journal of vacuum science & technology. $n B, $p Microelectronics processing and phenomena : $b an official journal of the American Vacuum Society. |
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$a Journal of vacuum science and technology. $n B, $p Microelectronics processing and phenomena |
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$a Microelectronics processing and phenomena |
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$a New York, N.Y. : $b Published for the Society by the American Institute of Physics, $c 1983-c1990. |
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$a 8 v. : $b il. ; $c 29 cm. |
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$a Quarterly, $b Jan.-Mar. 1983- |
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$a 2nd ser., v. 1, no. 1 (Jan.-Mar. 1983)-2nd ser., v. 8, no. 6 (Nov./Dec. 1990). |
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$a Title from cover. |
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$a Chemical abstracts $x 0009-2258 |
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$a Also issued on microfilm. |
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$a Includes: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams; and: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, also issued separately. |
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$a Vacuum technology $v Periodicals. |
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$a Vacuümtechniek. $2 gtt |
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$a Micro-elektronica. $2 gtt |
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$a American Vacuum Society. |
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$a American Institute of Physics. |
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$i Online version: $t Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online) $w (DLC) 2006263268 $w (OCoLC)71441616 |
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$t Journal of vacuum science and technology $x 0022-5355 $w (DLC) 68053979 $w (OCoLC)1754855 $w (arbccab)016871 |
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$t Journal of vacuum science & technology. B, Microelectronics and nanometer structures $x 1071-1023 $w (DLC) 94657460 $w (OCoLC)23276603 |
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$8 2 $a <3>- $i <1985>- $x provisional |
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$a 1983-1986, 1-4; 1987, 5 (1). |
