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$a ###83643441# $z sn#82003445# |
| 016 |
7# |
$a 9890566 $2 DNLM |
| 016 |
7# |
$a SR0088359 $2 DNLM |
| 022 |
0# |
$a 0734-2101 $l 0734-2101 $2 1 |
| 040 |
## |
$a NSDP $c NSDP $d MH $d NST $d DLC $d NST $d OCoLC $d NST $d DLC $d AIP $d NST $d AIP $d NSDP $d NST $d NSDP $d AIP $d DLC $d NST $d NSDP $d DLC $d WaU $d CU-S $d MCM $d NSDP $d MCM $d MH $d WaU $d DNLM $d OCoLC $d CaQMU $d WaU $d DLC $d NSDP $d CU-S $d CLU $d NLGGC $d InU $d CU-S $d OCoLC |
| 082 |
04 |
$a 621.5/5/05 $2 19 |
| 210 |
0# |
$a J. vac. sci. technol., A, Vac. surf. films |
| 222 |
#0 |
$a Journal of vacuum science & technology. A. Vacuum, surfaces, and films |
| 245 |
00 |
$a Journal of vacuum science & technology. $n A, $p Vacuum, surfaces, and films : $b an official journal of the American Vacuum Society. |
| 246 |
1# |
$i Issues for -Nov./Dec. 2002 also called: $a JVST A |
| 246 |
3# |
$a Journal of vacuum science and technology. $n A, $p Vacuum, surfaces, and films |
| 246 |
30 |
$a Vacuum, surfaces, and films |
| 260 |
## |
$a New York : $b Published for the Society by the American Institute of Physics, $c 1983-2002. |
| 300 |
## |
$a v. : $b il. ; $c 29 cm. |
| 310 |
## |
$a Bimonthly $b -Nov./Dec. 2002. |
| 321 |
## |
$a Quarterly, $b Jan./Mar. 1983- |
| 362 |
0# |
$a 2nd ser., v. 1, no. 1 (Jan./Mar. 1983)-v. 20, no. 6 (Nov./Dec. 2002). |
| 500 |
## |
$a Title from cover. |
| 580 |
## |
$a Each year the Mar./Apr. issue is republished and issued separately in a special hardbound edition which contains the proceedings of the U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride (after 1988 the name of the conference varies). |
| 650 |
#0 |
$a Vacuum technology $v Periodicals. |
| 650 |
17 |
$a Vacuümtechniek. $2 gtt |
| 710 |
2# |
$a American Vacuum Society. |
| 710 |
2# |
$a American Institute of Physics. |
| 776 |
08 |
$i Online version: $t Journal of vacuum science & technology. A, Vacuum, surfaces, and films (Online) $x 1520-8559 $w (DLC)sn 98004661 $w (OCoLC)37329463 |
| 780 |
01 |
$t Journal of vacuum science and technology $x 0022-5355 $w (DLC) 68053979 $w (OCoLC)1754855 $w (arbccab)016871 |
| 785 |
00 |
$t Journal of vacuum science & technology. A, International journal devoted to vacuum, surfaces, and films $x 1553-1813 $w (DLC) 2004204902 $w (OCoLC)56061703 |
| 852 |
## |
$x universal pattern |
| 853 |
## |
$8 1 $a v. $b no. $u 4 $v r $i (year) $j (month) $w q $x 01 |
| 853 |
## |
$8 2 $a v. $b no. $u 6 $v r $i (year) $j (month/month) $w b $x 01 |
| 863 |
## |
$8 1 $a <1>- $i <1983>- $x provisional |
| 866 |
#0 |
$a 1983-1987, 1-5; 1988, 6 (1). |
