Silicon device processing ; proceedings

Charles P. Marsden, editor.

Washington : U.S. National Bureau of Standards; for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1970.

x, 457 págs. : ilustraciones ; 27 cm.

Serie: NBS special publication ; 337

"A United States Department of Commerce publication."

"CODEN: XNBSA."

"Held ... under the sponsorship of Committee F-1 of the American Society for Testing and Materials and the National Bureau of Standards."

Incluye referencias bibliográficas.