Catálogo Bibliográfico
LDR | ·····cam##22·····#a#4500 |
001 | 006532 |
005 | 20061124103258.0 |
008 | 710521s1970####dcua#####b####100#0#eng## |
245 | 10 | $a Silicon device processing ; $b proceedings / $c Charles P. Marsden, editor. |
260 | ## | $a Washington : $b U.S. National Bureau of Standards; for sale by the Supt. of Docs., U.S. Govt. Print. Off., $c 1970. |
300 | ## | $a x, 457 p. : $b il. ; $c 27 cm. |
490 | 1# | $a NBS special publication ; $v 337 |
504 | ## | $a Incluye referencias bibliográficas. |
111 | 2# | $a Symposium on Silicon Device Processing $d (1970 : $c Gaithersburg, Md.) |
700 | 1# | $a Marsden, Charles P., $e ed. |
710 | 2# | $a American Society for Testing and Materials. $b Committee F-1 on Materials for Electron Devices and Microelectronics. |
810 | 1# | $a United States. $b National Bureau of Standards. $t Special publication $v 337. |
082 | 00 | $a 621.3815/2 $2 19 |
086 | ## | $a C 13.10:337 |
650 | #0 | $a Silicon $v Congresses. |
010 | ## | $a ###74608543# |
029 | ## | $a NLGGC $b 780563670 |
050 | 00 | $a QC100 $b .U57 no. 337 |
049 | ## | $a AR5A |
040 | ## | $a DLC $c DLC $d OCL $d DNU $d OCLCQ $b spa $d arbccab |
500 | ## | $a "A United States Department of Commerce publication." |
500 | ## | $a "CODEN: XNBSA." |
500 | ## | $a "Held ... under the sponsorship of Committee F-1 of the American Society for Testing and Materials and the National Bureau of Standards." |